| 摘要 |
PROBLEM TO BE SOLVED: To make constant the level of a signal subjected to electrostatic induction from a moving body electrode to a stator electrode even if a moving body is subjected to surface wobbling. SOLUTION: An electrostatic encoder induces an electric signal indicating an amount of mechanical relative position displacement from a plurality of electrodes (moving electrodes) provided on a moving substrate 2 to an electrode (fixed electrode) provided on a fixed substrate 1 by static electricity following a change in the relative positions of the fixed substrate 1 and the moving substrate 1 both having electrodes on the mutually opposing surfaces. At least one fixed electrode is disposed at a position opposite to the moving electrode on the moving substrate 2 and at mutually symmetrical positions relative to a prescribed center of the moving substrate in the fixed substrate 1. COPYRIGHT: (C)2011,JPO&INPIT |
