发明名称 |
PHOTOSENSITIVE ADHESIVE COMPOSITION, PHOTOSENSITIVE FILM ADHESIVE, ADHESIVE PATTERN, SEMICONDUCTOR WAFER WITH ADHESIVE, SEMICONDUCTOR DEVICE AND ELECTRONIC COMPONENT |
摘要 |
A photosensitive adhesive composition that can form an adhesive layer on an adherend and allows an adhesive pattern to be formed by exposure treatment with radiation and developing treatment with a developing solution, the photosensitive adhesive composition having solubility and developability, and the film thickness T 1 (µm) of the adhesive pattern formed after development satisfying the conditions represented by the following expression (1). T 1 / T 0 × 100 ‰¥ 90
[In expression (1), T 0 represents the film thickness (µm) of the adhesive layer before developing treatment.] |
申请公布号 |
EP2319892(A1) |
申请公布日期 |
2011.05.11 |
申请号 |
EP20090809946 |
申请日期 |
2009.08.26 |
申请人 |
HITACHI CHEMICAL COMPANY, LTD. |
发明人 |
KAWAMORI TAKASHI;MITSUKURA KAZUYUKI;MASUKO TAKASHI;KATOGI SHIGEKI |
分类号 |
C09J201/00;C09J4/00;C09J7/00;C09J7/02;C09J11/06;C09J163/00;C09J179/08;G03F7/004;G03F7/037;H01L21/52 |
主分类号 |
C09J201/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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