Procédé et appareil pour former des dépôts sous vide poussé,申请号FR19660065535-传众专利搜索

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发明名称	Procédé et appareil pour former des dépôts sous vide poussé
摘要
申请公布号	FR1483391(A)	申请公布日期	1967.06.02
申请号	FR19660065535	申请日期	1966.06.15
申请人	ION PHYSICS CORPORATION	发明人
分类号	C23C14/46;H01J37/305	主分类号	C23C14/46
代理机构		代理人
主权项
地址

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