Transfer device including robot arm for substrate and tranfer method for substrate using the same,申请号KR20040041360-传众专利搜索

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发明名称	Transfer device including robot arm for substrate and tranfer method for substrate using the same
摘要
申请公布号	KR101033121(B1)	申请公布日期	2011.05.11
申请号	KR20040041360	申请日期	2004.06.07
申请人		发明人
分类号	G02F1/13	主分类号	G02F1/13
代理机构		代理人
主权项
地址

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