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发明名称
THIN FILM IMAGING METHOD AND APPARATUS
摘要
申请公布号
EP2319073(A1)
申请公布日期
2011.05.11
申请号
EP20090793712
申请日期
2009.07.09
申请人
BT IMAGING PTY LTD
发明人
BARDOS, ROBERT, ANDREW;TRUPKE, THORSTEN;MAXWELL, IAN, ANDREW
分类号
H01L21/66;G01N21/62;G01N21/88;G01R31/265
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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