FLUIDIZED BED REACTOR FOR PRODUCTION OF HIGH PURITY SILICON
摘要
Methods and apparatus for the production of high purity silicon including a fluidized bed reactor with one or more protective layers deposited on an inside surface of the fluidized bed reactor. The protective layer may be resistant to corrosion by fluidizing gases and silicon-bearing gases.
申请公布号
EP2318313(A1)
申请公布日期
2011.05.11
申请号
EP20090840944
申请日期
2009.11.20
申请人
SILIKEN CHEMICALS S.L.
发明人
SAN SEGUNDO SANCHEZ, JAVIER;MONTESINOS BARONA, JOSE LUIS;AYUSO CONEJERO, EVARISTO;VALES CANLE, MANUEL VICENTE;BENAVIDES REL, XAVIER;LUJAN GARCIA, PEDRO-TOMAS;TOMAS MARTINEZ, MARIA
