摘要 |
<p>PURPOSE: A vertical type substrate conveyor apparatus is provided to prevent the dropping accident of a substrate by including a dropping preventive unit. CONSTITUTION: A grip conveyor unit(100) compulsorily transfers a substrate. An secondary conveyor unit(200) is adjacently arranged to the grip conveyor unit. The secondary conveyor unit supports the substrate. A dropping preventive unit(300) prevents the escaping the substrate from a conveyor path. The dropping preventive unit includes a contact support roller, a roller support bracket and an actuator.</p> |