发明名称 SUBSTRATE FOR AN ELECTRONIC OR ELECTROMECHANICAL COMPONENT AND NANO-ELEMENTS
摘要 A substrate configured to support at least one electronic or electromechanical component and one or more nano-elements, formed with a base support, with a catalytic system, with a barrier layer, and with a layer configured to receive the electronic or electromechanical component, in single-crystal Si or in Ge or in a mixture of these materials. The catalytic system lies on the base support without any contact with the layer configured to receive electronic or electromechanical component and the barrier layer is sandwiched between the catalytic system and the layer configured to receive the electronic or electromechanical component. This barrier layer is without any contact with the base support.
申请公布号 EP2319076(A1) 申请公布日期 2011.05.11
申请号 EP20090782394 申请日期 2009.08.31
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES 发明人 GOISLARD DE MONSABERT, THOMAS;DEGUET, CHRYSTEL;DIJON, JEAN;KOSTRZEWA, MAREK
分类号 H01L21/768;H01L23/522;H01L23/532;H01L29/06 主分类号 H01L21/768
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