| 摘要 |
<p>PURPOSE: A substrate transferring device in a coating region and a coating apparatus having the same, and a method of transferring substrate are provided to maintain the transfer speed of a substrate by preventing a substrate from flowing in the longitudinal direction of the substrate. CONSTITUTION: In a substrate transferring device in a coating region and a coating apparatus having the same, and a method of transferring substrate, a transfer member(220) transfers a substrate(G) on the floating unit of a coating domain. A supply roll(222a) consecutively supplies the transfer member. A recovery roll(222b) collects the transfer member. The first and second rollers supplies the transfer member on the coating region. An optical discharge unit(226) removes static electricity from the transfer member.</p> |
