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发明名称
METHOD OF MAKING A NANOGAP FOR VARIABLE CAPACITIVE ELEMENTS
摘要
申请公布号
EP1618599(B1)
申请公布日期
2011.05.11
申请号
EP20040759726
申请日期
2004.03.22
申请人
ROBERT BOSCH GMBH;THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY
发明人
PARTRIDGE, AARON;LUTZ, MARKUS;KENNY, THOMAS
分类号
H01G5/16;B81C1/00;H01L;H01L21/00;H01L21/20;H01L27/14;H01L29/82;H01L29/84
主分类号
H01G5/16
代理机构
代理人
主权项
地址
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