Method and system for depositing multiple materials on a substrate

摘要

A system (10) for depositing two or more materials on a substrate (100) is provided. The system (10) comprises one or more susceptors (11) configured to define two or more recesses (12) for accommodating at least a first material (13) and a second material (14) respectively. The first and second materials (13, 14) are different. The system (10) further comprises one or more heaters for heating the first material (13) and the second material (14) for sublimation of the first and second materials (13, 14) for deposition on the substrate (100). A method for depositing two or more materials on a substrate (100) is also presented.