发明名称 Split gate non-volatile memory cell
摘要 A non-volatile memory (NVM) cell comprising a layer of discrete charge storing elements, a control gate, and a select gate is provided. The control gate has a first sidewall with a lower portion being at least a first angle 10 degrees away from 90 degrees with respect to substrate. Further, the select gate has a second sidewall with a lower portion being at least a second angle at least 10 degrees away from 90 degrees with respect to the substrate. The NVM cell further comprises a layer of dielectric material located between the first sidewall and the second sidewall.
申请公布号 US7939880(B2) 申请公布日期 2011.05.10
申请号 US20080103451 申请日期 2008.04.15
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 KANG SUNG-TAEG;MORA RODE R.
分类号 H01L29/788 主分类号 H01L29/788
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