发明名称 Color distribution measuring optical system, color distribution measuring apparatus, and color distribution measuring method
摘要 A color distribution measuring optical system generates an image of an object to be measured via an imaging optical system and a color matching function filter. The color matching function filter is an optical multilayer film filter, and the angle of arrangement of the color matching function filter can be changed, with respect to an optical axis of the imaging optical system, depending on the numerical aperture of the imaging optical system by a tilt angle changing device. Various imaging optical systems can be used even when the optical multilayer filter is used.
申请公布号 US7940394(B2) 申请公布日期 2011.05.10
申请号 US20100712751 申请日期 2010.02.25
申请人 NIKON CORPORATION 发明人 SATO MASATOSHI
分类号 G01N21/25 主分类号 G01N21/25
代理机构 代理人
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