发明名称 Dual wired integrated circuit chips
摘要 A semiconductor device having wiring levels on opposite sides and a method of fabricating a semiconductor structure having contacts to devices and wiring levels on opposite sides. The method including fabricating a device on a silicon-on-insulator substrate with first contacts to the devices and wiring levels on a first side to the first contacts, removing a lower silicon layer to expose the buried oxide layer, forming second contacts to the devices through the buried oxide layer and forming wiring levels over the buried oxide layer to the second contacts.
申请公布号 US7939914(B2) 申请公布日期 2011.05.10
申请号 US20080029589 申请日期 2008.02.12
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BERNSTEIN KERRY;DALTON TIMOTHY JOSEPH;GAMBINO JEFFREY PETER;JAFFE MARK DAVID;KARTSCHOKE PAUL DAVID;STAMPER ANTHONY KENDALL
分类号 H01L29/40;H01L21/02;H01L21/302;H01L21/331;H01L23/48;H01L23/52;H01L29/06 主分类号 H01L29/40
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