| 摘要 |
PURPOSE: A probe card assembly is provided to precisely control a horizontal state by controlling the relative heights of connection members with regard to a frame by set screws. CONSTITUTION: A probe card(110) is connected to integrated circuit devices for electrically testing integrated circuit devices on a substrate. A frame(130) is combined with the upper side of the probe card and mounts the probe card on the lower side of the tester to supply a test signal. A plurality of connection members(140) are combined with the frame to connect the frame to the tester. The connection members control the horizontal state of the probe card by controlling the relative height with regard to the frame. |
