| 摘要 |
PURPOSE: A multi point sensor device for measuring the evaporation rate of a high vacuum evaporation material is provided to increase the lifetime of the multi point sensor device by easily changing the position of a plurality of sensor crystals. CONSTITUTION: A plurality of multi crystal sensor cartridge fixing devices are attached to a rotation disk(30). A rotary disk is rotated by a rotation motor and a rotation shaft and is pushed by a cylinder. A signal pin body(32) is fixed to the inner wall of a cylindrical body(20). A feedthrough is connected for supplying a signal and coolants. A circular exposure is formed on the lower side of the cylindrical body. Gas is deposited on the crystal sensor. A chopper covering plate is installed on the outside of the cylindrical body.
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