| 摘要 |
PROBLEM TO BE SOLVED: To provide an article inspection device using a common signal processing part even if specifications such as the size or pitch of pixels and the like are different. SOLUTION: An X-ray detection part 8 includes: a conversion part 20 for converting X rays to an electric signal; and a signal processing part 21 for processing an electric signal, and an X-ray conversion part 8 includes: an X-ray conversion film 30 receiving the X rays transmitted through an article 12 to directly convert the X rays to the electric signal; and at least one pixel electrode 32A coming into contact with the X-ray conversion film 30. The signal processing part 21 includes: a circuit board 33 having an electric signal processing circuit formed thereto; and a plurality of the connection electrodes 34 provided on the circuit board 33 in parallel along the direction crossing the feed direction of the article 12 at an almost right angle, and taking out the electric signal formed by the X-ray conversion film 30, to the circuit board 33 from the pixel electrode 32A. One pixel electrode 32A overlaps a plurality of the connection electrodes 34 on a plan view. COPYRIGHT: (C)2011,JPO&INPIT
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