| 摘要 |
PROBLEM TO BE SOLVED: To smoothly and easily switch sizes when processing panel substrates of different sizes. SOLUTION: A carrying passage part constituting part 30 and an air floating part 40 are arranged for carrying the panel substrate 1 toward respective stages 10-13. The carrying passage constituting part 30 is constituted of a piezoelectric element row of arranging a piezoelectric element 33 at a predetermined pitch interval. This piezoelectric element row is formed as a piezoelectric element group 33G out of four piezoelectric elements 33a-33d, and cycle driving is repeatedly performed while successively delaying up to the final piezoelectric element 33d from the first piezoelectric element 33a, and a negative pressure suction port 35 is opened between the front-rear piezoelectric elements, and the panel substrate 1 is sucked to a surface of the piezoelectric element 33, and pressing force is made to act. COPYRIGHT: (C)2011,JPO&INPIT
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