| 摘要 |
PROBLEM TO BE SOLVED: To provide a group management system that improves productivity of an IC manufacturing factory. SOLUTION: A plurality of floor layout image data files are prepared in advance and stored in a storage folder (step A1). When a floor layout image is registered, an actually matching floor layout image data file is selected from the stored floor layout image data file group, and read in a layout display system 30 (step A2). In the floor layout image data file displayed on an operation screen, a plurality of substrate processing devices M1 to Mn are arranged and displayed in order on the basis of an actual floor layout drawing (step A3). A floor layout detail display file is stored (step A4). COPYRIGHT: (C)2011,JPO&INPIT
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