| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve a resonance characteristic in a piezoelectric thin-film resonator, while reducing the number of layers to be controlled in film thickness. <P>SOLUTION: The piezoelectric thin-film resonator includes: a substrate 1; a lower electrode 2; a piezoelectric film 3; an upper electrode 4; and a gap 6 arranged between the lower electrode 2 and the substrate 1, so as to be superimposed on a resonance part R1 where the lower electrode 2 faces the upper electrode 4. The resonator includes an additional pattern 10 at a position on the lower electrode 2, which includes a boundary portion between the resonance part R1 and a non-resonance portion. <P>COPYRIGHT: (C)2011,JPO&INPIT |
