| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface treatment agent that can effectively suppress pattern collapse of an inorganic pattern or resin pattern provided on a substrate, a surface treatment method using such a surface treatment agent, as well as a surface treatment agent that can carry out silylation treatment to a high degree on the surface of the substrate, and a surface treatment method using such the surface treatment agent. <P>SOLUTION: A surface treatment agent is used that is employed in hydrophobization treatment of a substrate surface and includes a silylation agent containing at least one compound having a disilazane structure and a solvent containing a five- or six-membered ring lactone compound. <P>COPYRIGHT: (C)2011,JPO&INPIT |
