| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein defective data which a device for inspecting patterns of substrates in the middle of manufacturing outputs, only includes feature quantity data such as coordinates data, areas, and projection lengths, and thus only coordinates data for moving to a defective position is effectively utilized. SOLUTION: An inspection device allows an external result confirmation device to perform search of image data or the like, by adding not only feature quantity data but also image data as defective data. The inspection device allows defective image during inspection to be displayed, by searching similar defects on images in case of a plurality of sheets of defective data, performing trend display of a search result, displaying a defective map by designating a sheet on the trend, and designating a defect on the defective map. COPYRIGHT: (C)2011,JPO&INPIT |
