| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe vibration control device free from splashing a liquid from a probe. SOLUTION: The probe vibration control device using the probe supports the other end of the probe 1 by one end of a first probe support member 2 and connects the other end of the first probe support member 2 to a rotary shaft/vertical movement shaft 3 in order to allow vertical, rotary, and parallel movements of the probe 1, wherein part of the other end of the probe 1 is fixed to a second probe support member 10 so as to protrude from the first probe support member 2, an elastic body 11 is inserted in between the second probe support member 10 and the first probe support member 2, and a probe drive shaft 12 is attached to between the second probe support member 10 and the rotary shaft/vertical movement shaft 3 for stabilization of movement. COPYRIGHT: (C)2011,JPO&INPIT |
