| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device that has reduced installation area, and a substrate processing device equipped with the substrate conveying device. SOLUTION: A substrate conveying chamber 4 includes a first space formation portion 4a which forms a first space E1 allowing a substrate holding portion 13 to swivel therein, and a second space formation portion 4b having a first opening 15 formed at a position closer to a shaft portion 11 than to a side wall 4B of the first space formation portion 4a in a direction (X direction) orthogonal to an axial direction. Consequently, the substrate conveying device 1 can be arranged more closely to a substrate processing portion 30 by an X-directional length L1 between the side wall 4B and first opening 15 of the substrate conveying chamber 4. Consequently, the substrate conveying device 1 has reduced installation area. Further, a driving portion 3 etc., causes the shaft portion 11 to expand and contract along the axis and also to turn it around the axis, and causes an articulated arm 12 to expand and contract to thereby convey a substrate W between a load lock 5 and the first opening 15. COPYRIGHT: (C)2011,JPO&INPIT |
