| 摘要 |
PURPOSE: A method for transferring a customer tray in a handler is provided to prevent a semiconductor device from being separated from a tray. CONSTITUTION: A cover covers a customer tray(S11). The customer tray is loaded on a soak chamber loading unit(S12). A soak chamber cover gripper separates the cover from the customer tray(S13). The customer tray is received in the first transfer unit and is transferred to a central chamber. A central chamber operation is performed in the semiconductor device(S14). The customer tray is transferred to the cover detaching position. The cover covers the customer tray(S15). The customer tray is transferred to a defrost chamber. The customer tray is loaded on the defrost chamber loading unit(S16). |
