ATMOSPHERIC PRESSURE PLASMA APPARATUS HAVING VORTEX GENERATOR

摘要

PURPOSE: An atmospheric pressure plasma apparatus with a vortex generating plate is provided to extend the staying time of a gas flowing into the discharging space between an RF electrode and a ground electrode. CONSTITUTION: A housing(110) includes an opened lower part when the housing is grounded. An RF electrode(120) is separated from a side of the housing to form a discharging space. A power supply unit(125) supplies power to the RF electrode. An insulator(130) is arranged in the housing and fixes the RF electrode to the housing with a gap. A gas supplied through the top of the discharging space is discharged in the discharging space. The discharged gas is sprayed through the lower part of the discharging space in a plasma state. A vortex generating plate(140) generates a vortex in the lower part of the housing. The vortex generating plate increases the staying time of the gas in the discharging space.