| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection apparatus and a method of inspecting defects for precisely inspecting defects even if an inspection region is not divided in a width direction. SOLUTION: The defect inspection apparatus includes a defect detection section, an intermediate data table, a comparison section for comparing the position of defect position information included in defect information with the position of defect position information of the intermediate data table, a period defect candidate detection section for detecting whether the position is within a range of period determination precision, an updating section for counting up a period determination number corresponding to the defect position information of the compared intermediate data table when the position is within a range of the period determination precision, a reference value determination section for determining whether the period determination number after the count-up is not less than a period determination reference value, a period defect determination section for detecting that a defect is a period defect when the period determination number is not less than the period determination reference number, and a resetting section for deleting data in the intermediate data table of defect position coordinates where no defects are detected when no defects are detected while an inspection target travels reset length R. COPYRIGHT: (C)2011,JPO&INPIT |
