| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coater forming a prescribed coating pattern by intermittently ejecting a coating liquid, the coater precisely forming even the shape of each pattern of a transitional part such as coating starting point or the end point. <P>SOLUTION: The controller of the coater controls an actuator with the control amount calculated based on an aimed shape set in a coating area and also successively stores the actual shape of the set part of the coating area which is detected by a shape detector and corrects the control amount for forming the set part of next coating area based on the deviation between the aimed shape and the actual shape of the set part. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
