| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for controlling operation of a vacuum pump device, preventing occurrence of a reverse air flow into a reaction chamber from the inlet of the vacuum pump device even if operation is performed to start the normal rotation and reverse rotation of a booster pump (BP) and a main pump (MP) so that a dry vacuum pump is overloaded by biting or the like of a product and an overloaded state is solved. SOLUTION: This device for controlling the operation of the vacuum pump device includes the main pump (MP) and booster pump (BP). In the device, a normal/reverse rotation means is provided for normally and reversely rotating a pump rotor in starting the main pump and booster pump when the product is deposited in the rotor casing and pump rotor of the main pump and/or the booster pump and the overloaded state is created while biting the product between the rotor casing and the pump rotor and/or between a pair of pump rotors, and a reverse air flow suppression means is provided for suppressing the reverse air flow flowing from an exhaust side to a suction side when the main pump and booster pump are started. COPYRIGHT: (C)2011,JPO&INPIT
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