| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a formation method for a recording magnetic pole by which ruthenium oxide caused on a surface of a ruthenium seed layer for plating is converted to ruthenium metal, thereby the occurrence of void defect and layer-peel-off on a recording magnetic pole plating-formed by using the ruthenium seed layer is suppressed. <P>SOLUTION: After an opening 23a is formed in a mold forming layer 200, the Ru seed layer is formed within the opening 23a. After the ruthenium seed layer is immersed in acidic solution including a surfactant, an electric potential lower than a hydrogen discharge reaction condition is supplied. Since the ruthenium oxide caused on the surface of the ruthenium seed layer is converted to ruthenium metal, the ruthenium seed layer 26r is obtained. After the ruthenium seed layer 26r is taken out from the acidic solution, it is immersed in electroplating liquid and a magnetic material is deposited in the opening 23a by an electroplating method. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
