| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for analysis of static electricity, which precisely inspect workpieces at each manufacturing stage by laser beams and also inspect electrodeless workpieces without any electric contact. SOLUTION: The method includes: a laser beam incidence step of irradiating the workpieces with laser beams while scanning; a reflection light detection step of detecting reflection light of the laser beams from the workpieces; an electrostatic field detection step of detecting an electrostatic field that changes because of incidence of the laser beams in the workpieces without any electric contact using a detection electrode of a static electricity detection sensor in synchronization with the reflection light detection step; an imaging step of imaging a detection signal acquired in the electrostatic field detection step, based on a detection signal acquired by the reflection light detection step; and an analysis step of analyzing the workpieces, based on electrostatic field strength distribution formed in the imaging step. COPYRIGHT: (C)2011,JPO&INPIT
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