| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure enabling a stable light output for a long time to be obtained by preventing generation of abnormal creeping discharge between corner parts of an outer electrode and caps at either end of an arc tube, in an excimer lamp equipped with the outer electrode formed by baking a paste containing metal fine particles extended in a tube axis direction on an outside face of the arc tube. SOLUTION: Glass layers are coated on at least corner parts of the outer electrode to prevent abnormal discharge between caps of both ends of the arc tube. COPYRIGHT: (C)2011,JPO&INPIT
|
