| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring force control device which can continuously measure without interrupting a measurement program when performing an inside face measurement of an object to be measured having a cut-out or a small diameter hole. SOLUTION: A position controller 64 disposed in a control device 32 obtains the difference Δθ between the rotation angle θ of a current stylus 26 to be detected and a target rotation angle θ<SB>0</SB>, and determines the amount of current to a voice coil motor 52 so that the difference Δθ becomes zero. Further, a variable limiter circuit 68 makes the torque applied to the stylus 26 by the voice coil motor 52 constant by controlling the amount of current from the position controller 64 constant by limiting to a limit value I<SB>1</SB>. Furthermore, a target rotation angle commanding part 60 switches the setting of the target rotation angle θ<SB>0</SB>in accordance with the relative position P' of a contact part 44 of the stylus 26 to the object to be measured. COPYRIGHT: (C)2011,JPO&INPIT
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