| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power generation device that improves efficiency of power generation and also reliability thereof. <P>SOLUTION: The power generation device includes a cantilever-forming substrate 20 which is formed using an element formation substrate 20a and has a frame (support) 21 and a cantilever 22, and a piezoelectric conversion unit (a power generation unit) 24 which generates an AC voltage according to vibration of the cantilever 22, wherein the lower electrode 24a and the upper electrode 24c of the piezoelectric conversion unit 24 are electrically connected with a pad 27a for the lower electrode and a pad 27c for the upper electrode. An insulating layer 25 which defines the contact area of the upper electrode 24c and a piezoelectric layer 24b and prevents short circuit of the upper electrode 24c and the lower electrode 24a is extended on the frame 21 on one surface side of the cantilever-forming substrate 20, all parts of the connection wiring 26c between the upper electrode 24c and the pad 27c for the upper electrode electrically connected with the upper electrode 24c are formed on the insulating layer 25, and the pad 27c for the upper electrode is formed on the insulating layer 25. <P>COPYRIGHT: (C)2011,JPO&INPIT |
