发明名称 SURFACE ACOUSTIC WAVE DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 A surface acoustic wave device includes first interconnections and second interconnections connected to a potential different from a potential connected to the first interconnections that are arranged on a piezoelectric substrate. The first interconnections three-dimensionally intersect with the second interconnections with insulating layers made of a thermosetting resin, disposed therebetween. Interdigital electrodes defining IDTs are films which have six-fold rotational symmetric spots appearing in an XRD pole figure and which are defined by Al films or Al—Cu alloy films containing Cu in an amount not greater than the solubility limit at about 25° C.
申请公布号 US2011102108(A1) 申请公布日期 2011.05.05
申请号 US20100958472 申请日期 2010.12.02
申请人 MURATA MANUFACTURING CO., LTD. 发明人 FUKUDA SHINICHI
分类号 H03H9/64;H04R17/00 主分类号 H03H9/64
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