摘要 |
A method for adjusting a spatial light modulator comprising an array of channels, the method includes selecting a plurality of channel sets, wherein all the channels in each set are contiguously arranged; determining a first intensity value for first output radiation in the channel sets; performing a first adjustment based on the first intensity value, including adjusting a control level of a first channel in the first channel set without adjusting a control level of a second channel in the first one of the channel sets; determining a second intensity value for second output radiation, which includes output radiation by some of the channels in the first channel set, and excludes output radiation provided by at least one channel in the first channel set; and performing a second adjustment based at least on the second intensity value.
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