| 发明名称 |
Charged Particle Extraction Device And Method Of Design There for |
| 摘要 |
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
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| 申请公布号 |
US2011100798(A1) |
申请公布日期 |
2011.05.05 |
| 申请号 |
US20110987396 |
申请日期 |
2011.01.10 |
| 申请人 |
FEI COMPANY |
发明人 |
BOSWELL RODERICK;SUTHERLAND ORSON |
| 分类号 |
C23C14/46;C23C14/04;G21K;H01J37/04;H01J37/08;H01J37/20;H01J37/244;H01J37/28 |
主分类号 |
C23C14/46 |
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