发明名称 SUPPORTING BODY AND SUBSTRATE STORAGE CONTAINER
摘要 A separate supporting body for supporting semiconductor wafers of &phgr;450 mm is attached to the inner surface of either side wall of a container body. Each supporting body is formed of a front supporting piece that is projected laterally from a frame and horizontally retains the wafer on, at least, the side part in the front peripheral edge; and a rear supporting piece that is projected laterally from frame and horizontally retains the wafer on, at least, the side part in the rear peripheral edge. Front supporting piece is formed of a projected part that extends from the front of frame toward the front peripheral edge of the semiconductor wafer and a curved part that extends rearwards from projected part along the peripheral edge of the semiconductor wafer.
申请公布号 US2011100870(A1) 申请公布日期 2011.05.05
申请号 US20090997414 申请日期 2009.06.12
申请人 SHIN-ETSU POLYMER CO., LTD. 发明人 OHNUKI KAZUMASA;SHIDA HIROYUKI;ODASHIMA SATOSHI
分类号 B65D85/00;F16M13/00;H01L21/673 主分类号 B65D85/00
代理机构 代理人
主权项
地址