发明名称 AUTOMATED CORRECTIVE AND PREDICTIVE MAINTENANCE SYSTEM
摘要 A method and system for automated corrective and predictive maintenance is described herein. In one embodiment, a failure notification associated with a tool is received, wherein the failure notification indicates one or more failure events for the tool. Maintenance data associated with the tool is obtained, wherein the maintenance data includes one or more maintenance events for the tool. An optimal schedule is created for the tool by merging the failure notification and the maintenance data.
申请公布号 WO2011054005(A2) 申请公布日期 2011.05.05
申请号 WO2010US55170 申请日期 2010.11.02
申请人 APPLIED MATERIALS, INC.;YEDATORE, MANJUNATH S.;BHATIA, DEEPAK;PRESCOTT, JOHN 发明人 YEDATORE, MANJUNATH S.;BHATIA, DEEPAK;PRESCOTT, JOHN
分类号 G06F17/00;G06F11/00;G06F15/16 主分类号 G06F17/00
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