发明名称 |
AUTOMATED CORRECTIVE AND PREDICTIVE MAINTENANCE SYSTEM |
摘要 |
A method and system for automated corrective and predictive maintenance is described herein. In one embodiment, a failure notification associated with a tool is received, wherein the failure notification indicates one or more failure events for the tool. Maintenance data associated with the tool is obtained, wherein the maintenance data includes one or more maintenance events for the tool. An optimal schedule is created for the tool by merging the failure notification and the maintenance data. |
申请公布号 |
WO2011054005(A2) |
申请公布日期 |
2011.05.05 |
申请号 |
WO2010US55170 |
申请日期 |
2010.11.02 |
申请人 |
APPLIED MATERIALS, INC.;YEDATORE, MANJUNATH S.;BHATIA, DEEPAK;PRESCOTT, JOHN |
发明人 |
YEDATORE, MANJUNATH S.;BHATIA, DEEPAK;PRESCOTT, JOHN |
分类号 |
G06F17/00;G06F11/00;G06F15/16 |
主分类号 |
G06F17/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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