发明名称 ETCHANT COMPOSITION
摘要 The present invention relates to an etchant composition for etching a triple film consisting of an indium-based metal film, an aluminum-lanthanum-based alloy film, and a titanium-based metal film, wherein the etchant composition comprises: 1 to 15 wt % of hydrogen peroxide; 0.1 to 10 wt % of inorganic acid; and 0.01 to 5 wt % of a fluorine compound, with the remainder being water.
申请公布号 WO2011052909(A2) 申请公布日期 2011.05.05
申请号 WO2010KR06953 申请日期 2010.10.12
申请人 DONGWOO FINE-CHEM CO., LTD.;LEE, SUCK-JUN;SHIN, HYE-RA;KWON, O-BYOUNG;LEE, YU-JIN 发明人 LEE, SUCK-JUN;SHIN, HYE-RA;KWON, O-BYOUNG;LEE, YU-JIN
分类号 C09K13/08;C23F1/20;C23F1/30 主分类号 C09K13/08
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