OPTICAL MEMBER FOR DEEP ULTRAVIOLET AND PROCESS FOR PRODUCING SAME

摘要

Disclosed is an optical member for deep ultraviolet having wavelengths of 250 nm and shorter, the optical member comprising synthetic quartz glass which contains substantially no halogen elements, has a maximum OH group content less than 10 wt.ppm, has contents of ODCs (oxygen-deficient defects) and E-prime centers less than 1×1014 cm-3 each, contains substantially no SiH and substantially no peroxy defects, and has a fictive temperature of 1,050ºC or lower.