<p>A window of solid light-transmissive polymer is formed in a polishing pad, and at least one surface of the window is treated to increase the smoothness of the at least one surface.</p>
申请公布号
WO2010124217(A4)
申请公布日期
2011.05.05
申请号
WO2010US32253
申请日期
2010.04.23
申请人
APPLIED MATERIALS, INC.;SWEDEK, BOGUSLAW, A.;BENVEGNU, DOMINIC, J.
