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发明名称
VERFAHREN ZUR HERSTELLUNG VON ISOLIERTEN INTEGRIERTEN HALBLEITERSTRUKTUREN
摘要
申请公布号
DE602008005793(D1)
申请公布日期
2011.05.05
申请号
DE200860005793T
申请日期
2008.11.14
申请人
TEXAS INSTRUMENTS DEUTSCHLAND GMBH
发明人
BLASTER, SCOTT;EL-KAREH, BAHID;YASUDA, HORISHI
分类号
H01L21/8228;H01L27/082
主分类号
H01L21/8228
代理机构
代理人
主权项
地址
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