Piezoelektrischer Tintenstrahldruckkopf und Herstellungsverfahren

摘要

Provided are a piezoelectric inkjet printhead and a method of manufacturing the same. The piezoelectric inkjet printhead is configured with two stacked and bonded substrates. An upper substrate is formed of a single crystal silicon substrate or an SOI substrate and includes an ink inlet therethrough. A lower substrate is formed of an SOI substrate having a sequentially stacked structure with a first silicon layer, an intervening oxide layer, and a second silicon layer. A manifold, pressure chambers, and dampers are formed in the second silicon layer by wet or dry etching, and nozzles are formed through the intervening oxide layer and the first silicon layer by dry etching. A piezoelectric actuator is formed on the upper substrate to apply a driving force to the respective pressure chambers for ejecting the ink. The piezoelectric inkjet printhead is configured with a small number of substrates for reducing manufacturing process and cost, and the intervening oxide layer is used as an etch stop layer to uniformly form the nozzles for improving ink ejecting performance.