发明名称 |
ÄTZSTOPP HARZE |
摘要 |
Silicone resins comprising 5 to 50 mole % of (PhSiO(3-x)/2(OH)x) units and 50 to 95 mole % (HSiO(3-x)/2(OH)x), where Ph is a phenyl group, x has a value of 0, 1 or 2 and wherein the cured silicone resin has a critical surface free energy of 30 dynes/cm or higher. These resins are useful as etch stop layers for organic dielectric materials having a critical surface free energy of 40 dynes/cm or higher. |
申请公布号 |
DE60239555(D1) |
申请公布日期 |
2011.05.05 |
申请号 |
DE2002639555 |
申请日期 |
2002.10.04 |
申请人 |
DOW CORNING CORP. |
发明人 |
BOISVERT, RONALD;GRIGORAS, STELIAN;HA, DAVID;HARKNESS, BRIAN;YEAKLE, CRAIG |
分类号 |
C08G77/12;C08G77/16;C09D183/04;H01L21/312;H01L21/768 |
主分类号 |
C08G77/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|