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发明名称
Herstellungsverfahren zum Erzeugen einer Halbleitervorrichtung
摘要
申请公布号
DE102006037045(B4)
申请公布日期
2011.05.05
申请号
DE200610037045
申请日期
2006.08.08
申请人
INFINEON TECHNOLOGIES AUSTRIA AG
发明人
HIRLER, FRANZ;MAUDER, ANTON
分类号
H01L21/762;H01L29/78;H01L29/872
主分类号
H01L21/762
代理机构
代理人
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地址
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