发明名称 |
METHOD FOR PRODUCING QUARTZ GLASS DOPED WITH NITROGEN AND QUARTZ GLASS GRAINS SUITABLE FOR CARRYING OUT THE METHOD |
摘要 |
In a known method for producing quartz glass that is doped with nitrogen, an SiO2 base product is prepared in the form of SiO2 grains or in the form of a porous semi-finished product produced from the SiO2 grains and the SiO2 base product is processed into the quartz glass with the nitrogen chemically bound therein in a hot process in an atmosphere containing a reaction gas containing nitrogen. From this starting point, a method is provided for achieving nitrogen doping in quartz glass with as high a fraction of chemically bound nitrogen as possible. This object is achieved according to the invention in that a nitrogen oxide is used as the nitrogen-containing reaction gas, and that a SiO2 base product is used that in the hot process has a concentration of oxygen deficient defects of at least 2×1015 cm−3, wherein the SiO2 base product comprises SiO2 particles having an average particle size in the range of 200 nm to 300 μm (D50 value). |
申请公布号 |
EP2315727(A2) |
申请公布日期 |
2011.05.04 |
申请号 |
EP20090780699 |
申请日期 |
2009.07.16 |
申请人 |
HERAEUS QUARZGLAS GMBH & CO. KG |
发明人 |
TROMMER, MARTIN;OCHS, STEFAN;WEBER, JUERGEN;WERDECKER, WALTRAUD;TRAEGER, NORBERT;LEBER, HELMUT |
分类号 |
C03B17/04;C03B19/01;C03B19/04;C03B19/06;C03B19/09;C03B20/00 |
主分类号 |
C03B17/04 |
代理机构 |
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