发明名称 |
SOLID IMMERSION LENS AND MICROSCOPE |
摘要 |
A solid immersion lens 1 comprises a spherical portion 2 and a bottom surface portion 3. The bottom surface portion 3 is attached in close contact with a substrate 10 of a semiconductor device to be an observed object. The bottom surface portion 3 of this solid immersion lens 1 is formed in a cylindrical shape. Thereby, a solid immersion lens which can be easily separated from the observed object after an observation and can, during an observation, allow a light flux with a high NA to pass and a microscope using the same can be obtained. |
申请公布号 |
EP1612590(A4) |
申请公布日期 |
2011.05.04 |
申请号 |
EP20040722001 |
申请日期 |
2004.03.19 |
申请人 |
HAMAMATSU PHOTONICS K.K. |
发明人 |
TERADA, HIROTOSHI;ARATA, IKUO;SAKAMOTO, SHIGERU |
分类号 |
G02B13/00;G01N21/03;G01N21/17;G01N21/88;G01N21/95;G02B3/04;G02B21/02;G02B21/33 |
主分类号 |
G02B13/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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