| 摘要 |
A method of forming a microphone, the method comprising:
forming a backplate;
forming a flexible diaphragm on at least a portion of the wet etch removable sacrificial layer;
adding a wet etch resistant material, a portion of the wet etch resistant material being positioned between the diaphragm and the backplate to support he diaphragm;
removing the sacrificial material before removing any of the wet etch resistant material added by the act of adding; and
removing the added wet etch resistant material after removing at least part of the sacrificial material. |
