| 摘要 |
In the floating zone-melting of a silicon rod, the supply and recrystallized rods are arranged at an angle to one another (acute, obtuse or right-angle). Both rod holders are rotatable and axially displaceable. The diameter of the recrystallized rod may be greater or smaller than that of the supply rod. Heating may be by induction coil, electrically heated radiation body, electron gun, or electric arc. A planar or conical induction coil may be placed adjacent to the outer surface of the "elbow" joining supply and recrystallized rods. An auxiliary induction coil may be employed to assist support of the molten zone. Pre- and afterheating devices may also be employed. A plurality of supply rods may be employed, one or more of which may be doped, e.g. with antimony. |
